pre_1362_-_cnc_form_measuring_instrument_series_web

PRE1362 CNC FORM MEASURING INSTRUMENT SERIES FORM MEASUREMENT THE WORLD’S LEADING RANGE OF CNC FORM MEASURING MACHINES USHERS IN A NEW AGE OF AUTOMATED MEASUREMENT.

2 Existing measurement process To be repeated for the number of workpieces. Ties up the operator for an extended period of time. Workpiece loading / unloading Positioning the measurement start point Workpiece leveling, etc. Measurement Analysis of recorded geometrical data Print CNC Measurement As soon as a workpiece pallet is loaded, measurement can be started. all workpi ces. A CNC measuring machine runs unmanned. Now the operator can commit to other tasks. CNC Sur face Roughness Measuring Instrument Sur f test Ex treme CNC Sur face Tex ture Measuring Instrument Formtracer Ex treme CNC Contour Measuring Instrument Contracer Ex treme Existing measurement process To be repeated for the number of workpieces. Ties up the operator for an extended period of time. Workpiece loading / unloading Positioning the measurement start point Workpiece leveling, etc. Measurement Analysis of recorded geometrical data Print CNC Meas As soo measur all workpi ces. A CNC me Now the o Mitutoyo provides powerful solutions for improving measurement efficiency. Towards improved measurement efficiency

3 Applicable workpiece Measurement conditions Time for measurement Number of measurement point s: Approx. 40 point s Measuring position: Pin /Journal / Thrust sur face. Measuring direc tion: Along the axis of each c ylindrical unit /On the sur face of each thrust bearing. Preliminar y arrangement s: Shif ting workpiece /Changing workpiece position /Alignment Analysis items: Sur face roughness / Straightness *A lignment in the dire c t ion of measurement or mount ing the shaf t t akes t ime, and c an require t wo people! Number of measurement point s: Approx. 60 point s Measuring position: Six sur faces and the inside diameter of each bore. Measuring direc tion: Multiple direc tions including the top, bot tom, and side sur faces; and in the inclined holes. Preliminar y arrangement s: Shif ting workpiece /Changing workpiece position / Alignment, etc. Analysis items: Sur face roughness /Contour and profile *Since more than ten posit ion changes are required to set the workpiece at the measur ing point , the measurement ef f icienc y is badl y af fe c ted! Number of measurement point s: Approx. 4 point s Measuring position: Near tip of tooth. Measuring direc tion: Tangent line Preliminar y arrangement s: Workpiece rotation / Workpiece positioning Analysis item: Contour and profile *A l though the rot ar y posi t ioning at ever y 9 0 degrees requires simple repet i t i ve operat ions, a signi f ic ant di f ference will resul t in the amount of t ime required and the accurac y depending on the operator ’s skill. Number of measurement point s: Approx. 20 point s Measuring position: Seating sur face and holes Measurement direc tion: Top sur face and the hole inside diameter in any of the three direc tions. Preliminar y arrangement s: Shif ting workpiece /Changing workpiece position /Alignment, etc. Analysis items: Sur face roughness *T he s eat ing sur face c an be measured easil y af ter shi f t ing the workpie ce appropr iatel y. However, i t is not so eas y to measure the inside sur face roughnes s of a hole, since the measuring position may be dif ficult to see by the operator during positioning! Number of measurement point s: Approx. 3 point s / workpiece Measuring position: On the c ylinder’s generatrix. Measurement direc tion: Along the generatrix axis Preliminar y arrangement s: Workpiece change /Alignment Analysis items: Sur face roughness / Straightness *L i t t le t ime is required to measure onl y one pie ce. However, as the number of pie ces to be measured wi thin a day be comes large, so does the tot al t ime required for alignment , resul t ing in a t ime - consuming job! Number of measurement point s: Approx. 2 point s Measurement position: Along t wo lines crossing each other on the sec tional plane perpendicular to the optical axis Measurement direc tion: In the direc tion of st ylus retrac tion Preliminar y Arrangement s: Workpiece rotation / Workpiece leveling /Optical axis positioning Analysis items: Contour and profile / Tolerance zone measurement data / Sur face roughness *I t is cr i t ic al to measure at the s e c t ional prof ile, which is perpendicular to the opt ic al a x is and ne ces si t ates a signi f ic ant amount of t ime for es t ablishing the complete s et t ings! Number of measurement point s: Approx. 2 point s / workpiece Measuring position: On the c ylinder's generatrix Measurement direc tion: Along the generatrix axis Preliminar y arrangement s: Workpiece change /Alignment Analysis items: Sur face roughness / Straightness *I t t akes li t t le t ime to measure onl y one pie ce. However, since i t is of ten the c as e that many workpie ces are measured dur ing each job, the tot al s et t ing t ime required may be come too large for pie ce - by - pie ce s et t ing! Crankshaft Cylinder head Transmission gear Valve body Printer roll Aspheric surface lens Rotor/Spindle for motors Manual : 90 minutes CNC : 20 minutes Manual : 90 minutes CNC : 30 minutes Manual : 20 minutes CNC : 5 minutes (Each estimated time covers measurement of four teeth.) Manual : 40 minutes CNC : 15 minutes Manual : 50 minutes CNC : 15 minutes (Each estimated time covers measurement of ten rolls.) Manual : 40 minutes CNC : 5 minutes Manual : 40 minutes CNC : 20 minutes (Measurement of 20 workpieces is estimated within each time period.)

4 Accelerating measurement ef ficienc y through new measuring func tions under CNC control • •Tracking measurement func tion The Z2-axis control makes the target range of form (contour) tracing measurement wider than that covered by only the detec tor unit. ••Models with the α axis (incorporated with the drive unit tilting function) enable continuous measurement on multiple sections of surfaces including inclined portions without changing the initial set up. ••Installs the Automatic Leveling Function using the α axis or optional Auto Leveling Table. High-throughput measurement enabled by fast positioning ••Thank s to it s high drive speed (a maximum of 20 0 mm /s*) and multiple -axis simultaneous control, the detec tor can be positioned prac tically instantaneously on the target measurement point. (* Ma x imum 4 0 mm /s for CS -50 0 0 CNC, CS - H4 0 0 0 CNC, CS - H50 0 0 CNC) ••Inclined plane measurement func tion (sur face roughness) Simultaneous control over the X axis and Y axis enables oblique -movement measurement to be per formed. Even continuous measurement can be achieved without re -set ting the workpiece so that the measuring direc tion can be parallel to the drive unit. Par t program- guided automatic continuous measurement of multiple points /multiple workpieces The use of the Y-axis table makes it possible to per form automatic continuous measurement of multiple workpieces (measurement points). Z2 X-axis displacement range Y axis A Range of Func tions Enhance Your Measurement Efficiency

5 Easy-to -use Remote Box allows the operator to control the measuring unit at hand •• Eas y-to - under s t and operation but tons identified by each icon marked on the top. •• A lso prov ided with the Speed Override Knob, which allows the operator to change the traveling speed even during automatic execution. An anti - collision safety function is also provided to protect the operator, measuring unit , and/or workpiece from damage. •• This s afet y dev ice will automatically s top the measuring unit should a collision occur. FORMTR ACEPAK, the sur face roughness/form analysis sof tware that strongly suppor ts CNC measurement •• Workpiece identification (coordinate s y s tem alignment) I t is pos sible to measure the s ame point even when the current workpiece is positioned in a place of f set from that which was set at the time of creating the par t program, if the operator es t ablishes the workpiece coordinate s y s tem another time. Sur face roughness detector Direc tion of a collision that may cause the safet y device to be triggered Suppor ts multiple -par t measurement . •• By repeatedly running one sec tion of a par t program using the loop func tion, it is pos sible to batch -measure more than workpiece hav ing an identical form. One workpie ce I dent i fies the coordinate s y s tem through edge measurement. Repeated measurement v ia the loop func t ion Speed Override Knob that allows real-time change of traveling speed Easy-to -understand operation but tons Contour detector

6 Contributes greatly to your productivity improvement by increasing measurement throughput . The world’s leading range of CNC Form Measuring Machines ushers in a new age of automated measurement . CNC operation ensures that ever y user per forms measurements under the same conditions, even if there are differences in skills and exper tise. Your measuring ef ficienc y can be enhanced due to the comprehensive measuring func tions (e.g. tracking measurement / inclined plane measurement) under CNC control. Even multiple par ts mounted on a palette as well as single par ts with multiple measurement can be inspected easiliy and efficiently. Mitutoyo has achieved the maximum drive speed of up to 200mm/s together with a multiple axis simultaneous control, resulting in ultrafast movement towards the target measurement point. The drive speed has been increased to 40 times of a conventional instrument (5mm/s → 200mm/s). An easy-to -use Remote Box allows the operator to control the measuring process by hand. Provided with an anti- collison safet y func tion the instrument safeguards operator, measuring unit and /or workpiece against damage. FORMTRACEPAK, the analysis software for contour and roughness measurement, strongly suppor ts CNC measurement. FORMTRACEPAK – developed for the wide-ranging product line. It includes not only single-purpose surface roughness or contour measuring instruments, but also dual-purpose surface/contour measuring instruments and numerous additional peripheral options. This enables the user to choose the best instrument for the measurement tasks in hand. CNC Form Measuring Instrument Line-Up

7 Features • • High -accurac y st ylus t ype CNC Sur face Roughness Measuring Ins trument . ••X1, ( Y ), and Z2 axes have a maximum drive speed of 20 0 mm /s, which permit s high - speed positioning that may result in a large increase in the throughput of multiple -profile /multiple -workpiece measurement task s. ••Enables inclined plane measurement s through 2-axis simultaneous control in X- and Y-axis direc tions. ••For models with the a axis, it is possible to per form continuous measurement over horizontal and inclined sur faces by power-tilting the X1 axis. ••For models with a Y-axis table, it is possible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direc tion. ••For the Z1-axis detec tor, one of t wo t ypes with a measuring force of 4 mN or 0.75 mN can be selec ted. ••All connec ting cables are neatly housed in the measuring unit, which ensures measurement without any inter ference from the cables. ••Since the Z1-axis detec tor incorporates an anti - collision safet y device, the detec tor unit will automatically stop even if it s main body collides with a workpiece or jig. ••Supplied with an eas y-to - operate Remote Box, on which the user can make any movement by selec ting the required axis using the t wo joystick s. The current axis selec tion is easily identified by the icon on the key top. ••Communication with the Data Processing /Analysis sec tion is via USB. CNC Surface Roughness Measuring Instrument Surf test Ex treme SV-3000CNC

8 Features • • High -accurac y s t ylus t ype CNC contour measuring ins trument . ••X1, ( Y ), and Z2 axes have a maximum drive speed of 20 0 mm /s, which permit s high - speed positioning that may result in a large increase in the throughput of multiple -profile /multiple -workpiece measurement task s. ••For models with the a axis, it is possible to per form continuous measurement over horizontal and inclined sur faces by power-tilting the X1 axis. ••For models with the Y-axis table, it is possible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direc tion. ••The Z1 axis is provided with a digital detec tor (CV- 40 0 0CNC: incorporating the Mitutoyo Laser Holoscale) that cover s a wide measurement range and can be used for high -accurac y measurement. ••Enables inclined plane measurement s through 2-axis simultaneous control in the X- and Y-axis direc tions. ••Since the Z1-axis detec tor incorporates an anti- collision safet y device, the detec tor unit will automatically stop even if it s main body collides with a workpiece or jig. ••Supplied with an eas y-to - operate Remote Box, on which the user can make any movement by selec ting the required axis using the t wo joystick s. The current axis selec tion is easily identified by the icon on the key top. ••Communication with the Data Processing /Analysis sec tion is via USB. CNC Contour Measuring Instrument Contracer Ex treme CV-3000CNC / CV- 4000CNC

9 Features • • High -accurac y st ylus t ype CNC Sur face Roughness /Contour Measuring Ins trument that allows both measurement of sur face roughness and form /contour with one unit. ••X1, ( Y ), and Z2 axes have the maximum drive speed of 20 0 mm /s, which permit s high - speed positioning that may result in a large increase in the throughput of multiple -profile /multiple -workpiece measurement task s. ••For models with the a axis, it is possible to per form continuous measurement over horizontal and inclined sur faces by power-tilting the X1 axis. ••For models with the Y-axis table, it is possible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direc tion. ••The CV-t ype Z1-axis is provided with a digital detec tor (SV- C40 0 0CNC : incorporating the Mitutoyo Laser Holoscale) that cover s a wide measurement range and can be used for high-accurac y measurement. ••Enables inclined plane measurement s through 2-axis simultaneous control in the X- and Y-axis direc tions. ••When the detec tor for contour measurement is replaced with that for sur face roughness measurement, or vice ver sa, it is a simple, one -touch replacement without re -routing of the connec ting cables. ••Since the Z1-axis detec tor incorporates an anti- collision safet y device, the detec tor unit will automatically stop even if it s main body collides with a workpiece or jig. ••Supplied with an eas y-to - operate Remote Box, on which the user can make any movement by selec ting the required axis using the t wo joystick s. The current axis selec tion is easily identified by the icon on the key top. ••Communication with the Data Processing /Analysis sec tion is via USB. CNC Surface Roughness/Contour Measuring Instrument Formtracer Ex treme SV- C3000CNC / SV- C4000CNC

10 Features • • High -accurac y st ylus t ype CNC Measuring Ins trument that allows simultaneous measurement of sur face roughness and contour. ••The X1 axis has a maximum drive speed of 40 mm /s, and ( Y ) and Z2 axes have a maximum drive speed of 20 0 mm /s, respec tively. This permit s high - speed positioning that may result in a large increase in the throughput of multiple -profile /multiple -workpiece measurement task s. ••A Mitutoyo Laser Holoscale is incorporated in the X1 axis and Z1 axis so that high resolution ( X1 axis: 6. 25 nm, Z1 axis: 1nm (4 nm / 8 nm: CS -50 0 0CNC , 1 nm / 2 nm: CS - H50 0 0CNC ) is achieved and batch measurement of contour and sur face roughness can be made. ••The ac tive control method is employed for the Z1-axis detec tor to implement a wide - range measurement capabilit y wherein the variation in dynamic measuring force is restric ted. ••Since the Z1-axis detec tor incorporates an anti- collision safet y device, the detec tor unit will automatically stop even if it s main body collides with a workpiece or jig. ••For models with the a axis*, it is possible to per form continuous measurement over horizontal and inclined surfaces by power-tilting the X1 axis. ••For models with the Y-axis table, it is possible to expand the measuring range for multiple workpieces, etc., through positioning in the Y-axis direc tion. ••Supplied with the eas y-to - operate Remote Box, on which the user can make any movement by selec ting the required axis using the t wo joystick s. The current axis selec tion is easily identified by the icon on the key top. ••Uses USB for communicating with the Data Processing /Analysis Unit (optional). CNC Surface Tex ture Measuring Instrument Formtracer Ex treme CS-H4000CNC / CS-5000CNC / CS-H5000CNC * N ot available onl y for CS - H4 0 0 0 CNC / CS - H50 0 0 CNC

11 Features • • CNC Sur face Roughness Measuring Ins trument that cover s measurement of large / heav y workpieces such as engine block s, crank shaf t s, etc. ••In combination with the rotation of the detec tor unit, it is possible to measure continuously in the horizontal and ver tical planes. ••Supplied with either the large table for suppor ting a load of 10 0 kg or a large θ2 table, depending on the order. ••Suitable for automatic sur face roughness measurement on large and heav y workpieces. ••Employs the column -moving t ype configuration that is not restric ted by workpiece size. ••This is advantageous for measuring heav y workpieces such as engine block s, crank shaf t s, etc. ••Provides 80 0 mm of Y-axis stroke. This makes it possible to measure multiple profiles on large workpieces. • • Load table has a self- contained s truc ture to ensure that various size workpieces, jigs, auto -feed devices, etc., are easily accommodated and can be specified, if required, by special order. • • Sur face roughness detec tor rotating unit, S -30 0 0AR (optional), cover s continuous measurement over the bot tom and side sur faces of a workpiece. ••Compatible with the Large - size Rotar y Table (optional). ••Enables continuous automatic measurement of large - size workpiece. Y-axis Column Moving Type Surface Roughness Measuring Instrument Surf test Ex treme SV-M3000CNC

12 Examples of optimal combinations of accessories : Es sential : Bet ter to prov ide with : Not neces s ar y Optional accessor y Function Y-axis Table θ1 Table θ2 Table Drive unit tilting function Large θ Table Rotar y-type detector holder Automatic leveling ­ Automatic alignment (Patent regis tered: Japan) Multiple workpiece batch measurement Measurement in the Y-a x is direc tion Oblique measurement of X Y plane *2 Out side 3D sur face roughnes s measurement / evaluation *2 Multiple - piece measurement in the Y-a x is direc tion (Positioning in the Y-a x is direc tion) Multiple - piece measurement in the radius direc tion (Positioning in the rot ating direc tion of X Y plane) Wide choice of optional accessories expands the application range - 1 *1: Applic able onl y to contour measurement *2: Applic able onl y to sur face roughnes s measurement *3: Applic able onl y for S V- M30 0 0 CNC

13 Optional accessor y Func tion Y-axis Table θ1 Table θ2 Table Drive unit tilting function Large θ Table Rotar y-type detector holder Tracking measurement in the Z-a x is direc tion *1 Inclined sur face measurement in the X-a x is direc tion Inclined hole inside measurement in the X-a x is direc tion Multiple c y linder generatrices measurement Measurement of both top and bot tom sur faces Rot ar y positioning of large workpiece *3 Upward /downward and front ward / back ward measurement of large workpiece *3 : Es sential : Bet ter to prov ide with : Not neces s ar y

14 Standard stylus 12AAE882 (1 µm)* 12AAE924 (1 µm) 12AAC731 (2 µm)* 12AAB403 (5 µm) 12AAB415 (10 µm) 12AAE883 (250 µm)* ( ): T ip radius For small hole 12AAC732 (2 µm)* 12AAB404 (5 µm) 12AAB416 (10 µm) ( ): T ip radius For extra small hole 12AAC733 (2 µm)* 12AAB405 (5 µm) 12AAB417 (10 µm) ( ): T ip radius For extra minute hole For deep hole Double-length for deep hole For small hole/Double-length for deep hole For small hole For ultra small hole For small slotted hole 12AAC734 (2 µm)* 12AAB406 (5 µm) 12AAB418 (10 µm) ( ): T ip radius 12AAE898 (2 µm)* 12AAE914 (5 µm) ( ): T ip radius 12AAE892 (2 µm)* 12AAE908 (5 µm) ( ): T ip radius 12AAE884 (ø1.6 mm) 12AAE885 (ø0.5 mm) 12AAE938 (2 µm)* 12AAE940 (5 µm) Double length 12AAC740 (2 µm)* 12AAB413 (5 µm) 12AAB425 (10 µm) ( ): T ip radius Triple length 12AAC741 (2 µm)* 12AAB414 (5 µm) 12AAB426 (10 µm) ( ): T ip radius 90 0.9 37.7 7.6 44.7 3 1.8 ø2.4 ø1.2 1.6 ø1.2 ø2.4 ø2.4 ø0.3 ø0.3 0.4 1.6 ø1.2 ø2.4 3.4 2.4 ø2.4 94.7 87.7 94.4 87.7 0.6 30 A ø1.6 carbide ball 41 A 7 37.7 94.4 87.7 0.6 45 A ø0.6 0.6 43.8 7 ø0.5 carbide ball 87.7 93.8 0.6 ø0.6 Detail view of section A Detail view of section A Detail view of section A 0.6 ø2.4 ø1.2 5.2 A Color coding Color coding Color coding Color coding Color coding Color coding Detail view of section A Detail view of section A Detail view of section A Detail view of section A Detail view of section A Detail view of section A 0.6 0.4 1.6 ø0.6 90 ø2.4 15 ø1.2 3.4 2.4 1.6 0.6 37.7 44.4 A 0.4 1.2 ø0.3 90 ø2.4 8.9 ø0.6 2.5 37.7 1.2 44.2 A ø0.3 90 0.8 0.4 ø2.4 37.7 2.5 ø0.6 8.9 44.2 0.8 A ø2.4 87.7 0.9 Ø1.2 90 94.7 7.6 5.2 A ø2.4 137.7 0.9 7.6 144.7 ø1.2 90 5.2 A Styli * T ip angle: 60° 14 60 ø8 ø14 ø14 ø7 10 11.5 3.1 3.6 1.3 Skidless nosepiece (12AAB355) 4 Detector 178-396-2 [0.75 mN] 178-397-2 [4 mN] Stylus nosepiece (SV-3000CNC / SV- C3000CNC / SV- C4000CNC / SV-M3000CNC) Wide choice of optional accessories expands the application range - 2

15 * T ip angle: 60° 13 ø2.4 0.9 ø1.2 90 14.2 37.7 23 21.8 5.2 95.2 43.8 36.5 36.5 35 35 42.6 5.2 5.2 Ø3 Ø3 Ø2.4 45.2 37.7 ø2.4 93.8 93.8 94.7 6.77 93.8 87.7 50 35 0.9 87.7 ø1.2 ø0.8 ø1.2 87.7 ø1.2 87.7 Ø1.2 Ø1.2 87.7 ø2.4 Ø1.2 44.7 A 23 0.9 ø2.4 24.2 ø1.2 90 37.7 44.7 A 33 31.8 5.2 ø1.2 A ø2.4 Ø2.4 90 37.7 45.2 60 60 45 60 60 7.6 6.4 37.7 43.8 ø1.2 ø2.4 A 7.6 ø2.4 ø2.4 5.2 6.4 7.6 5.8 37.5 31.4 25 7.6 ø3 5 ø1.6 ø2.4 ø1.2 0.9 37.7 44.7 Ball ø1.588 5.2 7.6 ø2.4 ø1.2 90 37.7 0.9 44.7 A A 37.7 0.9 90 ø1.2 45.2 7.6 10 ø2.4 ø2.4 Styli Color coding Color coding Color coding Color coding Color coding Color coding Detail view of section A Detail view of section A Detail view of section A Detail view of section A Detail view of section A Detail view of section A For deep groove (10 mm) 12AAC735 (2 µm)* 12AAB409 (5 µm) 12AAB421 (10 µm) ( ): T ip radius For deep groove (20 mm) 12AAC736 (2 µm)* 12AAB408 (5 µm) 12AAB420 (10 µm) ( ): T ip radius For deep groove (30 mm) 12AAC737 (2 µm)* 12AAB407 (5 µm) 12AAB419 (10 µm) ( ): T ip radius For gear tooth For eccentric arm 12AAB339 (2 µm)* 12AAB410 (5 µm) 12AAB422 (10 µm) ( ): T ip radius 12AAC739 (2 µm)* 12AAB412 (5 µm) 12AAB424 (10 µm) ( ): T ip radius For knife-edge detector 12AAC738 (2 µm)* 12AAB411 (5 µm) 12AAB423 (10 µm) ( ): T ip radius For rolling circle waviness surface For deep groove (20 mm) For deep groove (40 mm) For deep groove (30 mm)/ Double-length for deep hole For gear tooth/ Double-length for deep hole For bottom surface of hole For corner hole/Double-length for deep hole For rolling circle waviness/ Double-length for deep hole 12AAB338 (0.8 mm) 12AAC736 (2 µm)* 12AAB408 (5 µm) 12AAB420 (10 µm) ( ): T ip radius 12AAE895 (2 µm)* 12AAE911 (5 µm) ( ): T ip radius 12AAE894 (2 µm)* 12AAE910 (5 µm) ( ): T ip radius 12AAE896 (2 µm)* 12AAE912 (5 µm)* ( ): T ip radius 12AAE886 (250 µm) 12AAE899 (2 m)* 12AAE915 (5 m) ( ): T ip radius 12AAE939 (2 µm)* 12AAE941 (5 µm) ( ): T ip radius 12AAE897 (2 µm)* 12AAE913 (5 µm) ( ): T ip radius

16 Arm Mode l Par t No. App l i c ab l e St ylu s No. H (mm) Straight A BH -53 12A A E29 4 SPH -51, 52, 53, 5 4, 55, 56, 57 6 A BH - 63 12A A E295 SPH - 61, 62, 63, 6 4, 65, 66, 67 12 A BH -71* 99 650 6 SPH -71, 72, 73, 74, 75, 76, 77, 79 20 A BH - 81 99 6507 SPH - 81, 82, 83, 8 4, 85, 8 6, 87 30 A BH -91 99 650 8 SPH -91, 92, 93, 9 4, 95, 9 6, 97 42 Eccentr ic A BH -52 99 650 9 SPH -51, 52, 53, 5 4, 55, 56, 57 6 A BH - 62 99 6510 SPH - 61, 62, 63, 6 4, 65, 66, 67 12 A BH -72 99 6511 SPH -71, 72, 73, 74, 75, 76, 77, 79 20 A BH - 82 99 6512 SPH - 81, 82, 83, 8 4, 85, 8 6, 87 30 A BH -92 99 6513 SPH -91, 92, 93, 9 4, 95, 9 6, 97 42 A rm for small hole A BH -21 12A A E29 6 SPH -21, 22, 23 — Arm Mode l Par t No. App l i c ab l e St ylu s No. H (mm) One - sided cut s t y lus SPH -51 35 4 8 82 A BH -53 · 52 6 SPH - 61 35 4 8 83 A BH - 63 · 62 12 SPH -71 35 4 8 8 4 A BH -71 · 72 20 SPH - 81 35 4 8 85 A BH - 81 · 82 30 SPH -91 35 4 8 8 6 A BH -91 · 92 42 I nter s e c t ing cut s t y lus SPH -52 35 4 8 87 A BH -53 · 52 6 SPH - 62 35 4 8 8 8 A BH - 63 · 62 12 SPH -72 35 4 8 89 A BH -71 · 72 20 SPH - 82 35 4 89 0 A BH - 81 · 82 30 SPH -92 35 4 891 A BH -91 · 92 42 Conic al s t y lus T ip angle: 20 ° (Carbide) SPH -57 12A A E8 65 A BH -53 · 52 6 SPH - 67 12A A E8 66 A BH - 63 · 62 12 SPH -77 12A A E8 67 A BH -71 · 72 20 SPH - 87 12A A E8 6 8 A BH - 81 · 82 30 SPH -97 12A A E8 69 A BH -91 · 92 42 Conic al s t y lus T ip angle: 30 ° (S apphire) SPH -53 35 4 892 A BH -53 · 52 6 SPH - 63 35 4 893 A BH - 63 · 62 12 SPH -73 35 4 89 4 A BH -71 · 72 20 SPH -79 355129 A BH -71 · 72 20 SPH - 83 35 4 895 A BH - 81 · 82 30 SPH -93 35 4 89 6 A BH -91 · 92 42 Conic al s t y lus T ip angle: 30 ° (Carbide) SPH -56 12A A A566 A BH -53 · 52 6 SPH - 66 12A A A567 A BH - 63 · 62 12 SPH -76* 12A A A56 8 A BH -71 · 72 20 SPH - 8 6 12A A A569 A BH - 81 · 82 30 SPH -9 6 12A A A570 A BH -91 · 92 42 Kni fe - edge s t y lus SPH -5 4 35 4 897 A BH -53 · 52 6 SPH - 6 4 35 4 89 8 A BH - 63 · 62 12 SPH -74 35 4 899 A BH -71 · 72 20 SPH - 8 4 35 49 0 0 A BH - 81 · 82 30 SPH -9 4 35 49 01 A BH -91 · 92 42 Ball s t y lus SPH -55 35 49 02 A BH -53 · 52 6 SPH - 65 35 49 03 A BH -53 · 52 12 SPH -75 35 49 0 4 A BH -53 · 52 20 SPH - 85 35 49 05 A BH -53 · 52 30 SPH -95 35 49 0 6 A BH -53 · 52 42 Small hole s t y lus (One - sided cut ) SPH -21 12A A E297 A BH -21 0.4 SPH -22 12A AE29 8 A BH -21 1.0 SPH -23 12A A E299 A BH -21 2.5 Arm Applicability Table Stylus Applicability Table *St andard acces sor ies (CV-30 0 0 /4 0 0 0 s er ies, S V- C30 0 0 /4 0 0 0) * St andard acces sor ies (CV-30 0 0 /4 0 0 0 s er ies, S V- C30 0 0 /4 0 0 0) 130 15 ø8 15 ø3 185 15 ø8 H 55 13 ø1.6 ø4 0.4 Small hole stylus SPH-11/21/31 55 20 ø3 ø5 1 Small hole stylus SPH-12/22/32 55 ø4 2.5 Small hole stylus SPH-13/23/33 H H H H H H ø3 ø3 ø3 ø3 ø3 ø3 Straight arm Arm for small hole Intersecting cut stylus Conical stylus T ip ball diameter: 1 mm T ip material: Carbide 185 15 ø8 40 H Eccentric arm One-sided cut stylus Conical stylus T ip angle: 12° T ip radius: 25 µm Material: Carbide T ip angle: 20° T ip radius: 25 µm Material: Carbide T ip angle: 20° T ip radius: 25 µm Material: Carbide T ip angle: 20° T ip width: 3 mm T ip radius: 25 µm Material: Carbide T ip angle: 30° T ip radius: 25 µm Material: Sapphire or carbide Knife-edge stylus Ball stylus 130 15 ø8 15 ø3 185 15 ø8 H 55 13 ø1.6 ø4 0.4 Small hole stylus SPH-11/21/31 55 20 ø3 ø5 1 Small hole stylus SPH-12/22/32 55 ø4 2.5 Small hole stylus SPH-13/23/33 H H H H H H ø3 ø3 ø3 ø3 ø3 ø3 Straight arm Arm for small hole Intersecting cut stylus Conical stylus T ip ball diameter: 1 mm T ip material: Carbide 185 15 ø8 40 H Eccentric arm One-sided cut stylus Conical stylus T ip angle: 12° T ip radius: 25 µm Material: Carbide T ip angle: 20° T ip radius: 25 µm Material: Carbide T ip angle: 20° T ip radius: 25 µm Material: Carbide T ip angle: 20° T ip width: 3 mm T ip radius: 25 µm Material: Carbide T ip angle: 30° T ip radius: 25 µm Material: Sapphire or carbide Knife-edge styl Ball stylus Arms and for CV-3000CNC, CV-4000CNC, SV-C3000CNC, SV-C4000CNC Wide choice of optional accessories expands the application range - 3

17 Possible styli with the FORMTRACER models CS-5000 CNC and CS-H5000 CNC Styli for CS -H4000CNC , CS -5000CNC and CS -H5000CNC Standard 12AAD543 Ball tip 12AAD544 12AAD651 12AAD652 107 65.95 (31.5) 35.95 74.5 1 (6.5) (6.8) Ø4 Ø1.2 Ø6 40º 12.5 Ø1.2 Ø6 12.75 Ball Ø0.5 mm (31.5) 145.95 115.95 154.5 1 187 Ø6 (19) Ø4 Ø1.2 Ø6 40º 25 Ø1.2 Ø6 25.25 Ball Ø0.5 mm 6 15 / 10 35.95 65.95 Ø4 Ø6 1.6 (1.1) 74.5 (31.5) 106.6 / 106.4 0.6 40º 0.4 Ø1.2 0.4 40º 0.6 Ø0.6 Ø6 40º 16 Ø4 Ø6 12.5 (6.5) 35.95 Ø1.2 65.95 74.5 (31.5) 3 109 107 65.95 (31.5) 35.95 74.5 1 (6.5) (6.8) Ø4 Ø1.2 Ø6 40º 12.5 Ø1.2 Ø6 12.75 Ball Ø0.5 mm (31.5) 145.95 115.95 154.5 1 187 Ø6 (19) Ø4 Ø1.2 Ø6 40º 25 Ø1.2 Ø6 25.25 Ball Ø0.5 mm 6 15 / 10 35.95 65.95 Ø4 Ø6 1.6 (1.1) 74.5 (31.5) 106.6 / 106.4 0.6 40º 0.4 Ø1.2 0.4 40º 0.6 Ø0.6 Ø6 40º 16 Ø4 Ø6 12.5 (6.5) 35.95 Ø1.2 65.95 74.5 (31.5) 3 109 107 65.95 (31.5) 35.95 74.5 1 (6.5) (6.8) Ø4 Ø1.2 Ø6 40º 12.5 Ø1.2 Ø6 12.75 Ball Ø0.5 mm (31.5) 145.95 115.95 154.5 1 187 Ø6 (19) Ø4 Ø1.2 Ø6 40º 25 Ø1.2 Ø6 25.25 Ball Ø0.5 mm 6 15 / 10 35.95 65.95 Ø4 Ø6 1.6 (1.1) 74.5 (31.5) 106.6 / 106.4 0.6 40º 0.4 Ø1.2 0.4 40º 0.6 Ø0.6 Ø6 40º 16 Ø4 Ø6 12.5 (6.5) 35.95 Ø1.2 65.95 74.5 (31.5) 3 109 Type Dimensions Styli additional CS-H5000CNC Standard Double length For bores Eccentric 107 65.95 (31.5) 35.95 74.5 1 (6.5) (6.8) Ø4 Ø1.2 Ø6 40º 12.5 Ø1.2 Ø6 12.75 Ball Ø0.5 mm (31.5) 145.95 115.95 154.5 1 187 Ø6 (19) Ø4 Ø1.2 Ø6 40º 25 Ø1.2 Ø6 25.25 Ball Ø0.5 mm 6 15 / 10 35.95 65.95 Ø4 Ø6 1.6 (1.1) 74.5 (31.5) 106.6 / 106.4 0.6 40º 0.4 Ø1.2 0.4 40º 0.6 Ø0.6 Ø6 40º 16 Ø4 Ø6 12.5 (6.5) 35.95 Ø1.2 65.95 74.5 (31.5) 3 109 12AAJ037 107 65.95 (31.5) 35.95 74.5 1 (6.5) (6.8) Ø4 Ø1.2 Ø6 40º 12.5 Ø1.2 Ø6 12.75 Ball Ø0.5 mm (31.5) 145.95 115.95 154.5 1 187 Ø6 (19) Ø4 Ø1.2 Ø6 40º 25 Ø1.2 Ø6 25.25 Ball Ø0.5 mm 6 5 / 10 35.95 65.95 Ø4 Ø6 1.6 (1.1) 74.5 (31.5) 106.6 / 106.4 0.6 40º 0.4 Ø1.2 0.4 40º 0.6 Ø0.6 Ø6 40º 16 Ø4 Ø6 12.5 (6.5) 35.95 Ø1.2 65.95 74.5 (31.5) 3 109 Standard 12AAD545 Ball tip 12AAD546 107 65.95 (31.5) 35.95 74.5 1 (6.5) (6.8) Ø4 Ø1.2 Ø6 40º 12.5 Ø1.2 Ø6 12.75 Ball Ø0.5 mm (31.5) 145.95 115.95 154.5 1 187 Ø6 (19) Ø4 Ø1.2 Ø6 40º 25 Ø1.2 Ø6 25.25 Ball Ø0.5 mm 6 15 / 10 35.95 65.95 Ø4 Ø6 1.6 (1.1) 74.5 (31.5) 106.6 / 106.4 0.6 40º 0.4 Ø1.2 0.4 40º 0.6 Ø0.6 Ø6 40º 16 Ø4 Ø6 12.5 (6.5) 35.95 Ø1.2 65.95 74.5 (31.5) 3 109 Ø1.2 Ø6 60º 25 12AAJ039 12AAJ041 12AAD653 Detec tor Nosepiece

18 Measurement Control •• The Measurement Control screen has various command but tons appropriately arranged. They are required for creating and executing measurement procedures (par t programs). Since the but tons and display areas not frequently used can be optionally set for display or no - display, the operator is permit ted to arbitrarily cus tomize the screen layout as easily as pos sible for operation. •• Any operation procedure can be acces sed through a simple selec tion from the pull - down menu so as to be quickly ready for measurement. •• To aid ef fec tive measurement procedure (par t program) creation, the arrangement of the control but tons is consis tent with those on the Remote Box. •• The "Workpiece I dentification Func tion", for example, that detec t s the amount of of f set brought up during datum set ting and mechanically fine -adjus t s each a x is to the optimum set ting position for the measurement, as well as the "Coordinate Sy s tem A lignment" commands that generate the optimum coordinate s y s tem for each measurement par t allow fully automatic running. •• With the multi -a x is translation command that simult aneously controls the movement along a ma x imum of si x a xes it is now pos sible to reduce the operation time required by the measuring ins trument to a minimum and to fur ther reduce the tracing time. •• For measuring multiple par t s arranged on the palet te, the use of the multiple - par t loop func tion that repeat s a set of movement, measurement, and analy sis commands can reduce the time required to create the specific measurement s teps. Sof tware FORMTRACEPAK

19 Profile Analysis Function •• Various commands including the point command (10 kinds), line command (6 kinds), and circle command (6 kinds) are prov ided to cover the basic element s of anal y sis. St andard calculation commands that combine these element s for angle, pitch, and dis t ance calculations are also prov ided. The display method used by additional commands that are not regularly used can be optionally t ailored by the cus tomization func tion, e.g. "Hide", can be applied to the calculation command but ton to suit the application env ironment. •• The Outlier Removal Func tion is ver y useful, for example, to automatically remove irregular f laws from the dat a and set the calculation range for a sec tion in which the boundar y bet ween a circle and a line can not be easily identified. •• Calculation result s will be output as tex t (in the c s v or t x t format). The geometrical measurement dat a can be either output as a tex t file of point- series dat a or a CAD file ( in the DX F or IGES format) or copied onto the clipboard. I t is also pos sible to use some commercial document ation sof t ware and s t atis tical proces sing sof t ware to share the dat a on a PC that is not equipped with Mitutoyo - original analy sis sof t ware or if rever se engineering is intended with CAD. Surface Roughness Analysis Function •• Using the sur face roughnes s measurement dat a it is pos sible to conduc t analy sis that conforms to global s t andards including D I N EN ISO, V DA , J IS, ANSI , MOT I F, etc. •• This sof t ware has integrated not only parameter calculating func tions but also comprehensive graphical analy sis func tions, which can be widely used in daily qualit y control and R&D operations. •• A lso enhanced with the dat a correc tion func tion (applicable to inclination and a cur ved sur face) and dat a elimination func tion, etc.

20 Design dat a can be created from a CAD file (DX F - or IGES -format ted). M e a s u r e m e n t d a t a f r o m t h e m e a s u r i n g i n s t r u m e n t c a n a l s o b e c o n v e r t e d i n t o design dat a. In addition, lens design dat a, critical in the rating of aspheric lenses, can be created not onl y from the input (ma x imum 20 degrees) of a generic formula for the aspheric sur faces of revolution but also from the CS V-format ted tex t file. Design Data Generation Function This application ser ves to collate the measurement dat a with the design dat a created in the proces s of design dat a generation. The Bes t- Fit Func tion that allows both the design dat a and measurement dat a to be translated to their optimal coordinates is prov ided as s t andard. From this profile tolerance zone measurement result, it is not only pos sible to present a v isual form of geometrical dat a and the amount of error at each coordinate but also to output in tex t-file format, which can be applied for feedback to a machine tool, etc. Profile Tolerance Zone Measurement Function Generat ion of aspher ic sur face design values Design dat a generat ion P rof ile Tolerance Zone Measurement Resul t Output example of prof ile tolerance zone measurement resul t values P rof ile tolerance zone measurement resul t s Software FORMTRACEPAK

21 This sof t ware will analy ze the three - dimensional sur face roughnes s dat a collec ted from coordinate measurement with the Y-a x is t able. I t can of fer various v isual represent ation methods, such as shading display, mesh display, and contour- line display. Thus, the user can analy ze the t arget sur face tex ture from various angles by making use of not only the 3D Roughnes s Parameter Calculation, Profile Analy sis (area, volume), but also Bearing Area Cur ve (BAC), Amplitude Dis tribution Cur ve and Power Spec trum Analy sis, etc. 3D Data Analysis Program, FORMTRACEPAK- Pro (optional) This is optional sof t ware for ins t alling the ex ternal control func tion in the CNC form measuring ins trument. With this func tion it is pos sible to monitor and control the measuring ins trument conditions v ia R S -232C communication from PLC. External Communication Program, FORMEio (optional) CNC F o rm Mea s u r i ng I n s t r umen t Da t a P ro c e s s i ng Un i t PC Analysis Software FORMTRACEPAK Ex ternal Communication Sof tware FORMEio RS-232C PLC* Workpiece Feed Unit Operation Console Signal Tower Available signals: Approach SW, Limit SW * Programmable Logic Controller

22 SV-3000CNC Main unit X1 axis Measuring range 200 mm Resolution 0.05 µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Measuring speed 0.02-2 mm/s Measuring direction Retracting direction Traverse linearity 0.5 µm/200 mm Z2 axis (column) Travel range Standard column type 300 mm High column type 500 mm Resolution 0.05 µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Base size (W x D) 750 x 600 mm Base material Granite External dimensions (W x D x H) Standard column type 800 x 620 x 1000 mm High column type 800 x 620 x 1200 mm Mass Standard column type 240 kg (not including the Y-axis Table unit and Vibration Insulating Stand) High column type 250 kg (not including the Y-axis Table unit and Vibration Insulating Stand) Operating temperature and humidity ranges 15-25°C, 20-80% RH (without condensation) Storage temperature and humidity ranges -10-50°C, 5-90% RH (without condensation) Controller (common to all models) External dimensions (width x depth x height) 250 x 427 x 517 mm Mass 28 kg Communication interface USB Power supply specifications 100-120V, 200-240V ±10%, AC50/60Hz Power consumption 500W Remote Box (common to all models) External dimensions (W x D x H) 300 x 143 x 71mm Mass 1.5 kg Specifications

23 α-axis unit (common to only the installed models) Inclination angle +45° (counterclockwise), -10° (clockwise) Rotating speed under inclined condition 1 rpm Resolution of inclination angle 0.000225° Mass 9 kg Y-axis table unit (common to only the installed models) Measuring range 200 mm Minimum reading 0.05 µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Maximum loading capacity 20 kg (the center of gravity should be placed within 50 mm from the table center) Traverse linearity Surface roughness mode 0.5 µm/200 mm Contour mode 2 µm/200 mm Linear displacement accuracy (at 20°C, contour mode) ± (2+2L/100) µm L : Dimension between two measured points (mm) Table size 200 x 200 mm External dimensions (W x D x H) 320 x 646 x 105 mm Mass 35 kg Vibration Insulating Stand (optional) Vibration insulating mechanism Diaphragm air spring Natural frequency 2.5-3.5Hz Damping mechanism Orifice Leveling mechanism Automatic control with mechanical valves Air supply pressure 390 kpa Allowable loading capacity 350 kg External dimensions (W x D x H) 1000 x 895 x 715 mm Mass 280 kg Cabin (optional) External dimensions (W x D x H) Standard column type 1000 x 750 x 1100 mm High column type 1000 x 750 x 1300 mm Mass Standard column type 46 kg High column type 53 kg

24 CV-3000CNC/CV-4000CNC Main unit Model CV-3000CNC CV-4000CNC X1 axis Measuring range 200 mm Resolution 0.05 µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Measuring speed 0.02-2 mm/s Measuring direction Forward/backward direction Traverse linearity 2 µm/200 mm Linear displacement accuracy (at 20°C) ± (1+4L/200) µm L : Measuring length (mm) Z1 axis (detector unit) Measuring range 50 mm (±25 mm from the horizontal plane) Resolution 0.2 µm 0.05 µm Stylus up/down operation Arc movement Scale unit Reflective-type Linear Encoder Laser Holoscale Linear displacement accuracy (at 20°C) ± (3+2H/25) µm ± (0.8+I0.5HI/25) µm Measuring force 30 mN Traceable angle 70° for ascent, 70° for descent (depending on the sur face tex ture) Stylus tip Refer to page 15. Face of stylus Downward Z2 axis (column) Travel range Standard column type 300 mm High column type 500 mm Resolution 0.05 µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Base size (W x D) 750 x 600 mm Base material Granite External dimensions (W x D x H) Standard column type 800 x 620 x 1000 mm High column type 800 x 620 x 1200 mm Mass (not including the Y-axis Table unit and Vibration isolating Standard column type 240 kg High column type 250 kg Operating temperature and humidity ranges 15-25°C, 20-80% RH (without condensation) Storage temperature and humidity ranges -10-50°C, 5-90% RH (without condensation) Specifications Controller Common to all models, refer to page 21. Remote Box Common to all models, refer to page 21. α-axis Common to only the installed models, refer to page 22. Y-axis table unit Common to only the installed models, refer to page 22. Main unit dimensions Refer to page 27. Vibration Isolating Stand Standard accessory, refer to page 22. Cabin Standard accessory, refer to page 22.

25 SV-C3000CNC/SV-C4000CNC Main unit Model SV-C3000CNC SV-C4000CNC X1 axis Measuring range 200mm Resolution 0.05µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Measuring speed 0.02-2 mm/s Measuring direction Forward/backward direction Traverse linearity 2 µm/200 mm Linear displacement accuracy (at 20°C) ± (1+4L/200) µm L : Measuring length (mm) Measuring direction Retracting direction Traverse linearity 0.5 µm/200 mm Z1 axis (detector unit) Measuring range 50 mm (±25 mm from the horizontal plane) Resolution 0.2 µm 0.05 µm Stylus up/down operation Arc movement Scale unit Reflective-type Linear Encoder Laser Holoscale Linear displacement accuracy (at 20°C) ± (3+2H/100) µm ± (0.8+I0.5HI/25) µm Measuring force 30 mN Traceable angle 70° for ascent, 70° for descent (depending on the surface texture) Stylus tip 30° cone, tungsten carbide Face of stylus Downward Z2 axis (column) Travel range Standard column type 300 mm High column type 500 mm Resolution 0.05 µm Scale unit Reflective-type Linear Encoder Drive speed CNC mode Max. 200 mm/s Joystick control mode 0-60 mm/s Base size (W x D) 750 x 600 mm Base material Granite External dimensions (W x D x H) Standard column type 800 x 620 x 1000 mm High column type 800 x 620 x 1200 mm Mass (not including the Y-axis Table unit and Vibration isolating Stand) Standard column type 240 kg High column type 250 kg Operating temperature and humidity ranges 15-25°C, 20-80% RH (without condensation) Storage temperature and humidity ranges -10-50°C, 5-90% RH (without condensation) Sur face roughness mode (when the sur face roughness detec tor holder is used) Contour mode (when the CV-3000/CV- 4000 detec tor is used) Controller Common to all models, refer to page 21. Remote Box Common to all models, refer to page 21. α-axis Common to only the installed models, refer to page 22. Y-axis table unit Common to only the installed models, refer to page 22. Main unit dimensions Refer to page 27. Vibration Isolating Stand Standard accessory, refer to page 22. Cabin Standard accessory, refer to page 22.

26 CS -H4000CNC / CS -5000CNC / CS -H5000CNC Main unit Model CS - H4000CNC CS - H5000CNC / CS -5000CNC X1 axis L: Measurement length (mm) Measuring range 100 mm 200 mm Resolution 0.00625 µm Scale unit L aser Holoscale Drive speed CNC mode Max. 40 mm /s Joystick control mode 0 - 40 mm /s Measuring speed For sur face roughness: 0.02- 0.2mm /s, for contour: 0.02-2mm /s Measuring direc tion For ward / backward direc tion Traverse linearit y Using standard-length st ylus (0.05+0.0003L) µm (0.05+0.0003L) µm /(0.1+0.0015L) µm Using double -length st ylus – (0.1+0.0015L) µm /(0.2+0.0015L) µm Linear displacement accurac y (at 20°C) ± (0.16+0.001L) µm ± (0.16+0.001L) µm /± (0.3+0.002L) µm Z1 axis (detec tor unit) H: Measurement length (mm) Measuring range Using standard-length st ylus 12 mm Using double -length st ylus – 24 mm Resolution Using standard-length st ylus 1 nm 1 nm /4 nm Using double -length st ylus – 2 nm /8 nm St ylus up/down operation Arc movement Scale unit L aser Holoscale Linear displacement accurac y (at 20°C) ± (0.7+0.02H) µm ± (0.7+0.02H) µm /± (0.3+0.02H) µm Measuring force Using standard-length st ylus 4 mN constant Using double -length st ylus – 0.75 mN constant Traceable angle 60° for ascent, 60° for descent (depending on the sur face tex ture) St ylus tip Refer to page 16. Face of st ylus Downward Z2 axis (column) Measuring range Standard column t ype 300 mm High column t ype – 500 mm (only for CS -5000CNC) Resolution 0.05 µm Scale unit Reflec tive -t ype Linear Encoder Drive speed CNC mode Max. 200 mm /s Joystick control mode 0 -50 mm /s Base size ( W x D) 600 x 550 mm 750 x 600 mm Base material Granite Ex ternal dimensions ( W x D x H) Standard column t ype 600 x 570 x 992 mm 800 x 620 x 1000 mm High column t ype – 800 x 620 x 1200 mm (only for CS -5000CNC) Mass (not including the Y-axis Table unit and Vibration Isolating Stand Standard column t ype 190 kg 240 kg High column t ype – 250 kg (only for CS -5000CNC) Operating /storage temperature and humidit y ranges 15 -25°C /-10 -50°C, 20 - 80% RH / 5 -90% RH (without condensation) Specifications Controller Common to all models, refer to page 21. Remote Box Common to all models, refer to page 21. α-axis Common to only the installed models, refer to page 22. Y-axis table unit Common to only the installed models, refer to page 22. Vibration Isolating Stand Standard accessory, refer to page 22. Cabin Standard accessory, refer to page 22.

27 SV-M3000CNC Main unit X1 axis Measuring range 200 mm Resolution 0.05 µm Scale unit Reflec tive -t ype Linear Encoder Drive speed CNC mode Max. 200 mm /s Joystick control mode 0-50 mm/s Measuring speed 0.02-2 mm/s Traverse linearity Using standard-type detector 0.5 µm/200 mm Using long-type detector 0.7 µm/200 mm Using rotary- type detector Up/down direction 0.5 µm/200 mm Forward/backward direction 0.7 µm/200 mm Z2 axis (column) Measuring range 500 mm Resolution 0.05 µm Scale unit Reflec tive -t ype Linear Encoder Measuring force CNC mode Max. 200 mm /s Joystick control mode 0-50 mm/s Y-axis Measuring range 800 mm Resolution 0.05 µm Scale unit Reflec tive -t ype Linear Encoder Drive speed CNC mode Max. 200 mm /s Joystick control mode 0-50 mm/s Measuring speed 0.02-2 mm/s Traverse linearity Using standard-type detector Narrow range: 0.5 µm/50 mm, Wide range: 2 µm/800 mm Using long-type detector Narrow range: 0.7 µm/50 mm, Wide range: 3 µm/800 mm Using rotary-type detector Narrow range: 0.7 µm/50 mm, Wide range: 3 µm/800 mm Base unit Base size (W x D) 600 x 1500 mm Base material Steel Allowable loading capacity 300 kg Vibration isolating unit Air supply pressure 0.4 MPa Vibration insulating mechanism Diaphragm air spring Natural frequency 4.0-5.0Hz Damping mechanism Orifice & Oil damper Leveling mechanism Automatic control with mechanical valves External dimensions (W x D x H) 1085 x 1695 x 1922 Mass (including the vibration isolating unit) 1600 kg Operating temperature and humidity ranges 15 -25°C, 20 - 80% RH (without condensation) Storage temperature and humidity ranges -10 -50°C, 5 -90% RH (without condensation) Controller Common to all models, refer to page 21. Remote Box Common to all models, refer to page 21. α-axis Common to only the installed models, refer to page 22. Y-axis table unit Common to only the installed models, refer to page 22.

28 51 600 895 754 46 1000 17 5 Y=200 250 1000 (1200 ) 880 (1080 ) 174 X1= 200 10 110 90 105 Z 2=30 0 (50 0 ) 550 Y=100 200 800 600 715 1070 12 100 858 970 Z= 300 50.7 X=100 119 1785 800 40 935 289 231 330 (228) 250 600 995 Y=200 51 1100 (1300) 46 754 1000 X= 200 Standard-length stylus : 39.5 Double-length stylus : 27 Z= 300 (500) Z= 300 (500) X=200 1000 (1200) 880 (1080) 110 10 105 1080 718 Double-length stylus : 285 Standard-length stylus : 205 1100 46 754 330 1000 (228) X= 200 Standard-length stylus : 39.5 Double-length stylus : 27 Z= 300 Z= 300 51 Y=200 X=200 1000 880 110 10 105 1080 995 600 250 718 Double-length stylus : 285 Standard-length stylus : 205 Common to SV-3000CNC / CV-3000CNC / CV- 4000CNC / SV- C3000CNC / SV- C4000CNC CS-H4000CNC Uni t : mm CS-5000CNC CS-H5000CNC Ex ternal dimensions of main unit

29 Uni t : mm SV-M3000CNC A A 1460 984 100 (1695) 52 155 28 800 1400 580 15 X M8 Depth 10 (478 ) (478) 200 200 200 200 200 122 122 (9 0) 90 90 200 1080 842 200 580 500 ( Y-axis stroke) ( Z2-axis stroke) ( X1-axis stroke) Vibration isolating unit (4 places)

30 High-accuracy and easy-to -use oriented turntable Mitutoyo has achieved high rot ational accurac y in the radial direc tion together with high linear displacement accurac y in the a x ial direc tion. Thank s to this precision mechanism not only the roundnes s /c y lindricit y but also the flatnes s and many other parameter s of a workpiece can be measured with high accurac y. Moreover, since the s t andard turnt able is a t ype that enables automatic centering / leveling, the operator is freed from conventional centering and leveling operations on the workpiece, which are time - consuming and tedious. Detector position change function that enables Automatic Measurement (CNC) With precision control over the position (ver tical / horizont al ) of the holder arm unit that suppor t s the detec tor in addition to the detec tor tilting mechanism (ranging from 0 ° to 270 °, in 1° increment s), continuous automatic measurement on the out side diameter, inside diameter, top sur face, and bot tom sur face is pos sible. The enhanced of f- line teaching func tion also makes it eas y to create par t programs. Positioning sensor critical to actualize High-Accuracy Automatic Measurement (CNC) A Mitutoyo linear scale is used as the positioning sensor for the X-a x is dri ve unit. I t can direc tly sense the amount of detec tor unit displacement and per form high -accurac y positioning es sential for automatic measurement. Mode R A-220 0S CNC R A-220 0H CNC R A- H520 0S CNC R A- H520 0H CNC Turn Table Unit Rotational accurac y J ISB7451-1997 Radial direc tion (0.02 + 3.5H /10 0 0 0) µm* (0.02 + 3,8H /10 0 0 0) µm* Ver tical direc tion (0.02 + 3.5x /10 0 0 0) µm** (0.02 + 3,8x /10 0 0 0) µm** Rotational speed 2, 4, 6, 10 rpm 2, 4, 6, 10rpm (At automatic centering: Max. 20 rpm) Ef fec tive table diameter ø235 mm ø30 0 mm Range of centering / leveling adjustment ±3 mm, ±1° ±5 mm, ±1° Maximum loading capacit y 30 kg 80 kg (At automatic centering: 65 kg) Maximum diameter for measurement / loading ø256 mm, 580 mm ø356mm, ø680 mm Ver tical Column Unit Linearit y of ver tical movement (lc : 2.5 mm) Narrow range 0.1 µm /10 0 mm 0.05 µm /10 0 mm Wide range 0.15 µm / 30 0 mm 0.25 µm / 50 0 mm 0.14 µm / 350 mm 0.2 µm / 550 mm Parallelism with the rotation axis (On the generatrix basis) 0.7 µm / 30 0 mm 1.2 µm / 50 0 mm 0.2 µm / 350 mm 0.32 µm / 550 mm Travel speed Max. 50 mm /s Max. 60 mm /s Max imum measurement height (at I .D. or O.D. measurement) 30 0 mm 50 0 mm 350 mm 550 mm Maximum measurement depth ( When the standard st ylus is used) ø12.7 x depth of 26 mm ø32 x depth of 10 4 mm Radial direc tion Straightness (lc : 2.5 mm) 0.7 µm /150 mm 0.4 µm / 20 0 mm Perpendicularit y to the rotation axis (On the generatrix basis) 1.0 µm /150 mm 0.5 µm / 20 0 mm Amount, speed of travel 175 mm, Max. 30 mm /s 225 mm, Max. 50 mm /s Detec tor Measuring force 40 mN St ylus tip shape, material ø1.6 mm carbide ball ø1.6 mm carbide ball Detec tion range (normal / tracing) ±40 0 µm, ±5 mm ±40 0 µm, ±5 mm Available air pressure 0.39 MPa 0.39 MPa Radial direc tion Normal state 30 L /min 45 L /min Mass (including the main unit and mounting stand ) 180 kg 20 0 kg 650 kg 670 kg * H = Height above sur face of turnt able ** x = Dis t ance from turnt able a x is CNC Form Measuring Ins trument Roundtes t Ex treme R A-220 0 CNC / R A-H520 0 CNC

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